Deep UV (DUV) Coating

DUV DUV

Key working wavelength:

Key coating materials:

MgF2/LaF3; Al2O3/SiO2; HfO2/SiO2

Substrates:

Lens, prisms, windows etc.
Material: UV grade FS
Typical dimension: 2mm~150mm

193nm AR and HR coating

AR for 193nm (T>98.5% AOI:00)

DUV

HR for 193nm (R>96% AOI:00)

DUV

HR coating for 266nm and 308nm

HR for 266nm (R>99.5%, AOI: 00)

DUV

HR for 308nm (Random>99.5%, AOI: 450)

DUV

Laser coatings for 355nm

Absorption Test station for 355nm

DUV

Absorption for HR coating at 355nm (<100ppm) internal test

DUV

LIDT test station for 355nm

DUV

LIDT for HR coating at 355nm (>4J/cm2 10ns, tested in Spica

DUV

 

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